Two-axis motor with high density magnetic platen

ABSTRACT

An X-Y positioning machine has a forcer, with armature coils, that moves around on a platen, supported by an air bearing. Magnets embedded in the motor platen generate a fixed magnetic field with which the armature coils interact. Perpendicular elongated coils interact with the fields of magnets in columns and rows. When a traditional rectangular pattern of the magnets is provided, a packing density and average peak magnetic flux intercepted by the coils are limited to 50%. The present invention provides magnet configurations that provide greater than 50% maximum peak flux density and up to 100% packing density. Several magnet arrangements are provided: a first in which round magnets are used instead of square, and a second in which diamond-shaped magnets are used. The latter can be used at 100% packing density arrangement. In addition to high peak flux density for a narrow coil, these embodiments exhibit low cogging forces. A method of making the magnet is also provided. To create the equivalent of a closely-packed array of circular magnets, a single sheet of magnetizable material is pressed against an high permeability element such as one of iron, and a pair of adjacent coils pressed against the magnetizable material with currents running in opposite directions. This forms a pair of round adjacent magnetic regions. The coils are moved systematically over the sheet of magnetizable material and the magnetization repeated. This process repeats until the sheet has a close-packed array of magnetic regions.

BACKGROUND OF THE INVENTION

The present invention relates to devices known variously as traversingmachines, positioning devices, actuators, etc. More particularly, theinvention relates to such devices with the ability to traverse alongmore than a single axis.

A two-axis motor with a stage (also known as a forcer) supported by anair bearing on a motor platen surface is described in U.S. Pat. No.5,334,892, the entirety of which is incorporated herein by reference. Inthis motor, the motor platen has a rectangular array of permanentmagnets embedded in it. Mutually perpendicular sets of X and Y coils inthe stage interact with the magnetic fields of the magnets to move andposition the stage.

In the prior art motor described above, the packing density of themagnets in the motor platen is about 50%. It is desirable to increasethe magnetic flux density to increase the peak motive force on the stageand also to allow a larger air gap between the stage coils and theplaten magnets. Cogging is also an ever-present problem in such motors.

OBJECTS AND SUMMARY OF THE INVENTION

An object of the present invention is to provide a motor platen for anX-Y motor.

Another object of the present invention is to provide a motor platen foran X-Y motor that provides for high peak motive force.

Yet another object of the present invention is to provide a motor platenwith high magnetic flux density to allow large air gaps between thecoils and magnets.

Yet another object of the present invention is to provide a motor platenfor an X-Y motor that is simple to manufacture.

Yet another object of the present invention is to provide a motor platenfor an X-Y motor that is characterized by low cogging effects.

Briefly, an X-Y positioning machine has a forcer, with armature coils,that moves around on a platen, supported by an air bearing. Magnetsembedded in the motor platen generate a fixed magnetic field with whichthe armature coils interact. Perpendicular elongated coils interact withthe fields of magnets in columns and rows. When a traditionalrectangular pattern of the magnets is provided, a packing density andaveraged peak magnetic flux intercepted by the coils are limited to 50%.The present invention provides magnet configurations that providegreater than 50% averaged peak flux density and up to 100% packingdensity. Several magnet arrangements are provided: a first in whichround magnets are used instead of square, and a second in whichdiamond-shaped magnets are used. The latter can be used at 100% packingdensity arrangement. In addition to high peak flux density for a narrowcoil, these embodiments exhibit low cogging forces. A method of makingthe magnet is also provided. To create the equivalent of aclosely-packed array of circular magnets, one or more sheets ofmagnetizable material is squeezed between a high permeability elementsuch as piece of iron, and a pair of adjacent coils pressed against themagnetizable material with currents running in opposite directions. Thisforms a pair of round adjacent magnetic regions. The coils are movedsystematically over the sheet of magnetizable material and themagnetization repeated. This process repeats until the sheet has aclose-packed array of magnetic regions. Modular pieces of magnetizablematerial, each with a set of magnetized regions that form an integralnumber of cycles of the required pattern of magnetic regions, can thenbe tiled to form a translationally symmetric pattern. This methodfacilitates manufacturing by reducing the number of pieces that must behandled.

According to an embodiment of the present invention, there is provided,an X-Y positioning system, comprising: a generally planar motor platenwith a plurality of magnets, forming a planar array, attached thereto, astage movably connected to the motor platen, the stage having a firstlongitudinal coil arranged with a long axis thereof oriented in a firstdirection, the stage having a second longitudinal coil arranged with along axis thereof oriented in a second direction substantiallyperpendicular to the first direction, the plurality of magnets includingfirst magnets oriented with their north poles facing in a thirddirection perpendicular to a plane of the array and second magnets withtheir north poles facing in a fourth direction opposite the thirddirection, the coils being arranged such that it is possible to draw aline segment in a plane of the planar array where the line segmenttouches several of the first magnets without touching any of the secondmagnets, with less than 50% of the line segment running over an area notoccupied by a magnet.

According to another embodiment of the present invention, there isprovided, a positioning system, comprising: a motor platen with a planararray of substantially round magnets, the planar array having firstmagnets with their north poles facing in a first direction perpendicularto a plane of the planar array, the planar array having second magnetswith their north poles facing in a second direction, opposite the firstdirection, the first magnets forming a first regular array of parallelcolumns and a first regular array of parallel rows, the second magnetsforming a second regular array of parallel columns and a second regulararray of parallel rows, the first regular array of parallel columnsbeing parallel to the second regular array of parallel columns and thefirst regular array of parallel rows being parallel to the secondregular array of parallel rows, the planar array being characterized bya packing density of more than 50%, a stage movably connected to themotor platen, the stage having a first longitudinal coil with a longaxis parallel to the first axis and the stage having a secondlongitudinal coil with a long axis parallel to the second axis.

According to still another embodiment of the present invention, there isprovided, a positioning system, comprising: a motor platen with a planararray of substantially parallelogram-shaped magnets, the planar arrayhaving first magnets with their north poles facing in a first directionperpendicular to a plane of the planar array, the planar array havingsecond magnets with their north poles facing in a second direction,opposite the first direction, the first magnets forming a first regulararray of parallel columns and a first regular array of parallel rows,the second magnets forming a second regular array of parallel columnsand a second regular array of parallel rows, the first regular array ofparallel columns being parallel to the second regular array of parallelcolumns and the first regular array of parallel rows being parallel tothe second regular array of parallel rows, the planar array beingcharacterized by a packing density of approximately 100%, a stagemovably connected to the motor platen, the stage having a firstlongitudinal coil with a long axis parallel to the first axis and thestage having a second longitudinal coil with a long axis parallel to thesecond axis.

According to still another embodiment of the present invention, there isprovided, a motor, comprising: a base having a surface, a stage havingan X-motor and a Y-motor and a bearing to support the stage at asubstantially constant distance from the planar surface, the base havingan array of north-pole magnets and south-pole magnets, each having anorth pole, the X-motor and the Y-motor being effective to interact withfields generated by the north-pole and south-pole magnets to produce amotive force to move the stage relative to the base, the north-polemagnets being oriented with the north poles thereof directed oppositelythe north poles of the south-pole magnets, the north-pole and south-polemagnets being arranged in an array conforming to the surface such thatmutually parallel curves (the term "curve" being used in its generalmathematical sense to encompass straight lines as well is non-straightlines), parallel to the surface, can be placed at regular intervals,each curve substantially intercepting only one of the north-pole and thesouth-pole magnets without intercepting the other of the north-pole andsouth-pole magnets, each of the north-pole and south-pole magnets beingshaped such that the mutually parallel curves can also be placed suchthat first portions of each of the mutually parallel curves interceptingthe only one of the north-pole and south-pole magnets is greater thansecond portions not intercepting the only one of the north-pole andsouth-pole magnets and the mutually parallel curves having a constantslope in a coordinate system defined by a range of movement of themotor.

According to still another embodiment of the present invention, there isprovided, a method of making an array of magnets, comprising the stepsof: placing a generally planar piece of magnetizable material on a pieceof material with a magnetic permeability comparable to or greater thanthat of iron, placing, against a face of the piece of magnetizablematerial opposite the piece of high magnetic permeability material, apair of coils, generating currents in the coils, a direction of currentin one of the coils being opposite that of a direction of current in theother and holding the coils against the piece of magnetizable materialfor a sufficient period of time to form a magnetized region.

According to still another embodiment of the present invention, there isprovided, a method of making an array of magnets, comprising the stepsof: placing, against opposite faces of a generally planar piece ofmagnetizable material, a pair of coils, generating currents in thecoils, a direction of current in one of the coils being the same as thatof a direction of current in the other and holding the coils against thepiece of magnetizable material for a sufficient period of time to form amagnetized region.

The above, and other objects, features and advantages of the presentinvention will become apparent from the following description read inconjunction with the accompanying drawings, in which like referencenumerals designate the same elements.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic plan view of an X-Y positioning system with aposition and orientation-detecting apparatus according to an embodimentof the present invention.

FIG. 2a is a side view of an optical pickup taken along a longitudinalaxis.

FIG. 2b is a section view of the optical pickup of FIG. 2a taken acrossthe longitudinal axis.

FIG. 3 is a side view of a base of the X-Y positioning system of FIG. 2according to an embodiment of the invention.

FIG. 4 is a side view of the base of the X-Y positioning system of FIG.2 according to another embodiment of the invention.

FIG. 5 is a side view of the base of the X-Y positioning system of FIG.2 according to still another embodiment of the invention.

FIG. 6 is a side view of the base of the X-Y positioning system of FIG.2 according to still another embodiment of the invention.

FIGS. 7a-7d are side views of the base of the X-Y positioning system ofFIG. 2 according to still other embodiments of the invention.

FIG. 8a is section view of an armature a coil, without a highpermeability core, and a magnetic platen, the section being taken alonga longitudinal axis of one of the coils.

FIG. 8b is section view of an armature a coil, without a highpermeability core, and the magnetic platen, the section being takenacross the longitudinal axes of the coils.

FIG. 9 is a top view of a coreless, low-cogging, armature for an X-Ymotor according to an embodiment of the invention.

FIG. 10a and 10b are section and plan views of the base showing thepermanent magnets.

FIG. 11 is a section view of an assembly for making the base with theencoder plate.

FIGS. 12a, 12b, and 12c are plan views comparing three differentarrangements of reflective and non-reflective regions to form gridencoder scales according to respective embodiments of the invention.

FIGS. 13a, 13b, and 13c are plan views of permanent magnetshapes/arrangements to produce the stationary field with which the motorin the stage interacts to provide motive force to move the stage withrespect to the base.

FIGS. 14a, 14b, and 14c are section views of various methods of formingarrays of permanent magnets for the base.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

Referring to FIG. 1, an X-Y traversing system 1000 has a base 100, witha stage 101 supported on base 100 by several air bearings A1-A3. Stage101 has a built-in motor that orients and moves stage 101 with respectto base 100 as described in U.S. Pat. No. 5,334,892, the entirety ofwhich is incorporated herein by reference. Base 100 has an array ofpermanent magnets (not shown) with which motors M1, M2, and M3 in stage101 interact to cause stage 101 to move about base 100 with a constantorientation of stage 101.

Referring now also to FIGS. 2a and 2b, in order to employ X-Y traversingsystem 1000 for precise positioning, it is necessary to detect twoindependent coordinates representing the position of stage 101 relativeto base 100. An encoder system is employed to detect movement of stage101 relative to base 100. The encoder system includes a grid encoderscale 121 with circular regions 120 of a surface 130 of base 100 whosereflectivity is much higher than intersticial area 140 separatingcircular regions 120. (alternatively, circular regions 120 can have alow reflectivity and intersticial area 140, a high reflectivity.)Circular regions 120 are of a highly reflective coating formed onsurface 130 of base 100. An X-direction optical pickup 110 and aY-direction optical pickup 111 (not shown in FIGS. 2a and 2b, butidentical to X-direction optical pickup 110 as shown in FIGS. 2a and 2b)detect movement of stage 101 relative to base 100.

Note that the proportions of elements of X-Y traversing system 1000shown in FIG. 1 are deliberately distorted for illustration purposes.For example, in a practical system, the relative sizes of air bearingsA1, A2, and A3 would be chosen for proper balance and might not be thesame as illustrated. Optical pickups 110 and 111 would probably besubstantially smaller as would circular regions 120 (in fact the lattermight not be visible with the naked eye). Also, the sizes of motorsM1-M3 would be chosen according to known design principles and eachwould not likely be the same size as shown. In addition, details ofoptical pickups 110 and 111 are not necessarily as shown in FIGS. 2a and2b which was created for the purpose of providing a general explanationof how the encoder system works.

Each optical pickup 110, 111 projects light on its respectivediscrimination region 112, 113 and detects the light reflectedtherefrom. Light from a light source 370 is collimated by a condenserlens 375 and directed to a reticle 372. Reticle 372 has a series of maskregions 376 (usually a metalized coating over a substrate, where themetalized coating has been etched to define mask regions 376) comprisingan index grating. The spacing of mask regions 376 is substantially equalto a spacing or pitch of circular regions 120. Reflected light passesthrough reticle 372 to encoder scale 121. Mask regions 376 createshadows in the light beam transmitted through reticle 372. Whentransmitted light beams 378 coincide with circular regions 120, they aresubstantially reflected since circular regions 120 are more reflectivethan intersticial area 140. When encoder 110 moves in the X-direction adistance equal to half the dot-pitch, the transmitted light beams 378hit substantially only the intersticial area, reducing the amount oflight reflected. Reflected light passes back through reticle 372 and isdetected by a photo-sensor 371. As X-direction optical pickup moves thereflected light cycles between maxima and minima generating anelectrical signal that is processed to determine cumulative movement. Ascan be seen by inspection, X-direction optical pickup is responsiveessentially, only to movement in the X-direction since the lightreflected by short columns of circular regions 120 spanning the width ofreticle 372 is averaged. As can also be seen by inspection, Y-directionoptical pickup 111, using the same construction as X-direction opticalpickup 110, but aligned with the Y-direction instead of the X-direction,is responsive only to movement in the Y-direction. Instead of dots, gridscale 121 can be composed of a grid of overlapping lines definingsquares (which correspond to circular regions 120) between them. Inaddition, it is not necessary that circular regions (or the squares, ifoverlapping lines are formed) have a higher reflectivity thanintersticial region 140. The opposite may be true and the system worksjust as well.

In summary, optical pickups 110, 111 each employ a reticle with agrating whose spacing corresponds to the spacing of columns of and rowsof circular regions of grid scale 121. Light produced by optical pickups110, 111 passes through a respective reticle and reflects from circularregions 120. Because the spacing of the grating corresponds to thespacing between columns and rows of circular regions 120, the totalamount of reflected light cycles as optical pickups 110, 111 move overgrid scale 121. Photo sensors 371 produce a signal corresponding to thenet reflected light which cycles for each increment of movement equal tothe circular region spacing.

In a practical system, to sense direction of movement, optical pickups110 and 111 could have multiple photo sensors 371 and the spacing ofmask regions 376 would not be the same as the period of reflectiveregions 120. A moving pattern (like a moire pattern) would be projectedon the multiple photo sensors and the direction of movement thusdetermined. Note that the proportions of elements of optical pickups 110and 111 have been distorted for explanation purposes. In a real device,the density of reflective regions 120 and the mask regions 376 in thereticle would probably be much higher. In addition, the spacing,thickness, and lens power of the elements is not intended to beaccurately represented by FIGS. 2a and 2b.

Circular regions 120 are arranged in a regular pattern with constantspacing between adjacent columns and rows of circular regions 120. Note,however, that if the resolution required for one axis is lower than thatrequired for the other axis, the spacing between rows need not be thesame as the spacing between columns.

According to a preferred embodiment of the invention, the distancebetween the motor coils and permanent magnets is increased from theusual spacing of a few thousands of an inch (required in stepper motorsthat employ serrations using the so-called "Sawyer principle") tospacings on the order of 0.05 inch. Motor coils (also known as"armatures") can have high-permeability cores or no cores at all, thecoils being embedded only in epoxy or some other non-magnetic insulator.Where high permeability material is used for a core, the material isusually laminated to minimize eddy current generation. The configurationof these motors, the armatures and the magnetic platen with which theycooperate, are described further below with reference to FIGS. 8a, 8b,and 9. For now, please note that this configuration, and others, permitthe spacing between the coils and motor platen to be large enough toaccommodate a layer of material with encoder scale 121 formed thereon.This layer can be a separate element (for example, as discussed withreference to FIG. 3, a mylar sheet 140 imprinted with circular regions120), which offers several advantages that are discussed below.

Referring to FIG. 3, circular regions 120A (exaggerated in size andproportion for clarity) are imprinted on a mylar sheet 140 adjacent to asurface 142 of a base plate 401 of base 100 to form an encoder plate320. In this embodiment, the imprinted surface 146 of mylar sheet 140faces surface 142 of base plate 401. Mylar sheet 140 is clear to allowoptical pickups 110, 111 to detect circular regions 120A. An optionalcover layer 202 or sheet of clear film (such as mylar) may be employedto protect mylar sheet 140, which has circular regions 120A imprinted onit. By using printing or etching technology to imprint on mylar sheetingrather than machining or imprinting on the surface of base 100 (athree-dimensional object) directly, great cost effectiveness may beachieved. In addition, should mylar sheet 140 become damaged (forexample, due to failure of the air bearings supporting stage 101) mylarsheet 140 or cover layer 202 can be readily replaced.

Circular regions 120A may be imprinted on mylar sheet 140 using knowndot-printing technology ordinarily employed for printing. Suchtechnology is well known for printing on surfaces of various materialsand is capable of high accuracy and high resolution. In addition to thelaser or LED (light emitting diode) technology used to produce a latentimage that is developed with toner, mylar sheet can also be metallizedand chemically etched. For example, mylar sheet 140 can be coated with ametal layer on which is deposited a photo-resist material which ischemically altered by light. After a latent light image is impressed onthe photo-resist, the differing properties of the exposed andnon-exposed photo-resist permit only a portion of the photo-resist to beremoved and the metal chemically etched only where photo-resist has beenremoved using known chemical etching techniques.

Referring to FIG. 4, in another embodiment of encoder plate 320,circular regions 120A, constituting grid encoder scale 121, are formed(by machining, chemical etching, printing, or some other means) directlyon surface 142 of base plate 401. Protective transparent sheet 210 islaid over surface 142 to protect grid encoder scale 121. Optionally acover layer 202 can be laid over protective transparent sheet 210 toprotect it. If the air bearings ever failed, protective transparentprotective sheet 210 and/or cover layer 202 protects surface 142 andgrid encoder scale 121. Cover layer 202, made of glass, plastic, mylar,and protective transparent sheet 210, can then be replaced.

Referring to FIG. 5, in still another embodiment of base 100 and encoderplate 320, circular regions 120A, constituting grid encoder scale 121,are formed (by chemical etching, machining, printing, or some othermeans) on the lower surface of glass sheet 210. Cover layer 202 of mylaror glass should be used to protect glass sheet 210 with grid encoderscale 121 to preserve its clarity.

Referring to FIG. 6, in still another embodiment of encoder plate 320,circular regions 120A, constituting grid encoder scale 121, are formedon the lower surface of mylar sheet 212. Mylar sheet 212 has a metalizedcoating 213 that has been etched to form circular regions 120A. Coverlayer 202 of mylar or glass should be used to cover mylar sheet 212 withgrid encoder scale 121. However, since mylar sheet 212 can be producedin continuous quantities (metal-coated with grid encoder scale 121etched thereon), cover layer 202 may not be necessary because of therelatively low cost of replacing 212, which may be laid over surface 142of base plate 401 and adhered by static charge, vacuum, gravity, orclamping at its edges. Note that irregularities in the orientation ofmylar sheet 212 do not present a problem since the data processing usedfor position/movement detection can compensate for such irregularitiesaccording to known data filtering techniques.

Referring to FIG. 7a, in still another embodiment of encoder plate 320circular regions 120A, constituting grid encoder scale 121, are formed(by chemical etching, machining, printing, or some other means) on theupper surface of glass sheet 210. A protective sheet of mylar or glass214 is used to cover glass sheet 210 with grid encoder scale 121.Optionally, cover glass or mylar sheet 214 can be overlaid with anothercover glass or mylar sheet 216 to protect cover glass or mylar sheet214. Cover glass or mylar sheet 216 preserves the transparency of coverglass or mylar sheet 214.

Referring to FIGS. 7b and 7d, in still another embodiment of encoderplate 320 hatch line regions 120A, constituting grid encoder scale 121A,are formed (by chemical etching, machining, printing, or some othermeans) on the upper surface of glass sheet 210. Hatch line regions 120A,including horizontal line regions 120B and vertical line regions 120C,define a plurality of square regions 120D between them. Square regions120D function similarly to circular regions 120A. A protective sheet ofmylar or glass 214 is used to cover glass sheet 210 with grid encoderscale 121A. Optionally, cover glass or mylar sheet 214 can be overlaidwith another cover glass or mylar sheet 216 to protect cover glass ormylar sheet 214. Cover glass or mylar sheet 216 preserves thetransparency of cover glass or mylar sheet 214.

Referring to FIGS. 7c and 7d, in still another embodiment of encoderplate 320 hatch line regions 120A, constituting grid encoder scale 121A,are formed (by chemical etching, machining, printing, or some othermeans) on the upper surface of base plate 401. Hatch line regions 120A,including horizontal line regions 120B and vertical line regions 120C,define a plurality of square regions 120D between them. A protectivesheet of mylar or glass 214 is used to cover glass sheet 210 with gridencoder scale 121A. Glass sheet 210 covers grid encoder scale 121 A.Optionally, glass sheet 210 can be overlaid with another cover glass ormylar sheet 216 to protect cover glass or mylar sheet 214. Cover glassor mylar sheet 216 preserves the transparency of cover glass or mylarsheet 210. Note that glass sheet 210 could be replaced by a mylar sheetor some other transparent sheet material. Also, in the FIG. 7cembodiment, grid encoder scale 121 could be formed on glass (or mylar)sheet 210 instead of base plate 401. Another alternative is to formhorizontal line regions 120B on one layer (for example glass sheet 210)and vertical line regions 120C on another layer (for example base plate401). This can make for easier manufacturing of hatch line regions 120A.

Encoder plate 320, configured according to any of various embodimentsdescribed above, is laid adjacent base 100. A differential signalderived from the two Y-axis optical pickups 111 is used to maintainorientation of stage 101 with respect to base 100.

Referring to FIGS. 8a, 8b, and 9a thin coreless type of armature employsmotor coils 347 embedded in an epoxy resin bed 346. No high-permeabilitymaterial is used inside motor coils 347. Epoxy resin bed 346 is attachedto a high permeability back plate 345. A motor platen 350 has an arrayof magnets 301 and 302 and backed by another high permeability plate344. High permeability plates 345 and 344 are preferably of steel forcost-effectiveness and strength, but can be made with other materials.High permeability plates 345 and 344 should have a high permeabilitysuch as materials typically employed in armatures with cores. Thepresence of high permeability plates 345 and 344 helps to close themagnetic circuits shown by lines 348. Without magnetic (highpermeability) materials immediately adjacent permanent magnets 301 and302, as in iron core armatures, cogging is drastically reduced. Furtherreduction in cogging can be achieved by shaping edges of armature backplate 345 as shown in FIG. 9. The detailed dimensions of hexagon-shapedback plate 345 are not given as they can be numerically andexperimentally optimized according to known techniques, the optimumdimensions varying at least with magnet size and spacing.

The forgiving spacing between magnetic platen 350 and armature 351allowed by employing motor coils encased in epoxy-only, rather thanusing high permeability materials, such as steel, is enhanced by usingrelatively thick magnets, on the order of 0.3-0.6 inch. Neodymium-ironmagnets are preferred with this type of motor configuration. The greaterspacing between the magnets and armature windings (motor coils) allowslayers of material, at least one with encoder scale 121 (121A) etched orprinted thereon can be laid over base 100.

Another alternative for the armature construction is to use pressedpowder materials. Pressed metal powder elements are made of finelydivided metal mixed with an insulative binder. The material is heatedand compressed to form a high-density, high strength material that canbe formed readily into an armature for an X-Y motor. The resultingarmature's ability to reduce eddy currents, unlike that for laminations,is isotropic. That is, since in such material, eddy currents areconfined to the small regions defined by the metal particlesencapsulated in binder material and the dimensions of such particles arestatistically the same regardless of orientation, it does not matterwhat the orientation of the permanent magnet fields relative to thearmature and its direction of movement. Eddy currents generated bymovement in nearly all axial directions are suppressed equally. This hasimportant ramifications for an X-Y motor, such as in the presentinvention. While it is possible to arrange the laminations in a rotaryor single-axis motor such that eddy currents will be strongly suppressedduring movement, in a two-axis motor, laminations cannot be oriented tostrongly suppress eddy currents in both X-and Y-oriented armatures forboth directions of movement. However, the pressed metal powder materialsuppresses eddy currents irrespective of the direction of movement. Suchmaterials are commercially available.

Referring now also to FIGS. 10a and 10b, to form base 100, a base plate401, which must be flat, but not necessarily as flat as required for theair bearing surface, is covered with a rectangular array of permanentmagnets 410. The spaces between, and overlying, permanent magnets 410are filed with epoxy 430 to completely cover permanent magnets 410 andbase plate 401. To form a smooth flat surface, a surface 440 of epoxy430, once epoxy 430 has been cured, is precision ground so that whenencoder plate 320 is laid on top, a flat surface is presented. Ofcourse, this assumes that surface irregularities will not be generatedby variations in the thickness of the materials making up encoder plate320.

Referring to FIG. 11, an alternative way of making base 100 compensatesfor such thickness variations in, for example, plate glass, used in theencoder plate embodiments described above. First, an optical flat 500 isprovided which has as flat a surface as desired for the air bearingsurface. Optical flat 500 is supplied with holes 510 which are connectedto a vacuum supply 520 so that a vacuum can be pulled between a surface501 of optical flat 500 and any object laid on top of it. Next, encoderplate 320, with the grid encoder scale facing surface 501, is laid ontop of optical flat 500. A vacuum is then pulled. Preferably, the vacuumshould be strong enough to cause the encoder plate 320 to flattenagainst the surface of optical flat 500 so that the surface of encoderplate 320 presenting the grid encoder scale is pulled completely flat(that is, there are no spaces between surface 501 of optical flat 500and encoder plate 320). Once encoder plate is drawn flat, permanentmagnets 301 (permanent magnets 302 are present also but not shown in thesection of FIG. 11) are arranged on a back surface 322 of encoder plate320 to form array of permanent magnets 312. Standoffs (not shown) can beused to separate permanent magnets 301, 302 from theimmediately-adjacent layer be it glass or whatever to allow epoxy toflow into the space between that layer and the magnets. The entiresurface is then covered with epoxy 316 to fill the spaces betweenpermanent magnets 301 and to cover the tops of permanent magnets 301.Before epoxy 316 is hardened, base plate 401 is laid on top of epoxy316. After epoxy 316 hardens, the vacuum is removed and base 100 iscompleted.

One advantage of using mylar as the outer protective sheet is that if aflat encoder plate is formed using the above method, the thicknessirregularities introduced in the outermost cover sheet layer will not beas great as if plate glass is used as a protective cover.

Referring now to FIG. 12a , 12b, and 12c, there are various ways to formthe regions with different reflective properties that form grid encoderscale 121. To obtain a scale for which the distance per cycle(cycle-pitch) of the signal from each optical pickup 110, 111 is S(signal's cycle-pitch=S), vertical and horizontal lines can be etched orprinted on surface 130, glass sheet 210, etc. to form squares S/2 by S/2in size. An improvement to rectangular pattern of squares can beobtained by forming dots instead of squares, which permits the maximumdimension of the regions to be increased from S/2 by S/2 squares to0.707S diameter circles (FIG. 12b). The diameter of the circles can beincreased even more if they are laid out in a 45-degree diagonal array(FIG. 12c), in which case, the circles can have a diameter of S for thesame signal cycle-pitch. Because of the larger region size relative tothe signal's cycle-pitch, the embodiments of FIGS. 12b and 12c permit afiner-resolution scale to be manufactured with technology capable ofdiscriminating regions with a given resolution. That is, if a givenprinting technology is capable of printing regions with a minimum sizeof S, then the resolution of the resulting scale using a 45° array ofcircular regions will be twice that of a rectangular pattern of verticaland horizontal lines.

Referring to FIGS. 13a, 13b, and 13c, permanent magnets 301 and 302 aretraditionally arranged in a rectangular array as shown in FIG. 13a. Asnoted above, motors M1-M3 contain X-direction and Y-direction coils,each of which subtends a longitudinal region (typically the region'swidth is about 1/4 the spacing of like-oriented poles, S). When the coilis aligned with the center of a column of like-oriented poles, theaverage flux intercepted by the coil is at a maximum. However, the fluxis averaged for all permanent magnets 301, 302 in a column so that theaverage peak flux intercepted by one motor coil is half the peak flux ofpermanent magnet 301, 302 alone.

According to one embodiment of the present invention, round magnets areused instead of square ones. The round magnets are arranged as shown inFIG. 13b so that their diameters can be as much as the length of thediagonals of the squares of the arrangement of FIG. 13a. If the circlesare close-packed, as shown in FIG. 13b, the ratio of average peak fluxto peak flux for magnet 301, 302 is increased, over the arrangement ofFIG. 13a, from 0.5 to 0.707 for a hypothetical infinitely narrow coil ora single wire. The arrangement of FIG. 13b has the additional advantageof reduced cogging. Measured cogging for the round-magnet close-packedarray shown in FIG. 13b, with S=1.2 inch is 0.9# versus 3# for theconfiguration of FIG. 13a.

According to another embodiment of the invention, a diamond array asshown in FIG. 13c is used. In this configuration, there is no spacebetween any magnets so the packing density is 100%. The ratio of averagepeak flux to peak flux for magnet 301, 302 approaches 1.0 for a singlewire, or a infinitely narrow coil (as opposed to a typical-size coil).For a coil of practical size, the ratio is actually between 0.6 and 0.7,depending on the coil width.

Note that the arrangement of the magnets in embodiments of FIGS. 13b and13c are similar to the arrangement of FIG. 13a in that magnets with thesame pole orientation form rows and columns that are aligned with thelong axes of the X-axis and Y-axis coils of the X- and Y- motorarmatures, respectively.

Note that the arrangements of FIGS. 13b and 13c are arranged such thatit is possible to position a thin coil or single wire in a plane of themagnet array where said coil runs over several of the north-orientedmagnets without touching any of south-oriented magnets, with less than50% of the coil or wire running over an area not occupied by a magnet.This means the averaged peak flux density intercepted by the coil orwire is greater than 50%. The graphs adjacent the plan view of the motorplatens of FIGS. 13a, 13b, and 13c, show the variation instantaneousaverage flux as the coil moves over the platen for a single wire 602 andfor a coil of more realistic dimension of about S/4 601, where thespacing between like-oriented magnets is S. As can be seen from thefigures, the peak flux for an S/4 wide coil and that for a single wireare the same, about 0.707. The former, however, falls off sooner thanthe latter as the real coil overlaps opposite poles for a greaterproportion of the total displacement. In the diamond-shaped magnetarray, the peak flux for a single wire is 100% but that for a realisticcoil of S/4 width is about 2/3.

Referring to FIG. 14a, to form the magnet array, pieces (for example,sheets) of magnetizable material 702 may be arranged on a base 703 ofmaterial characterized by high flux saturation levels. A pair of coils701 is then pressed against the magnetic material and a current passedthrough coils 701 to magnetize a region of magnetizable material 702,base 703 closing a magnetic circuit between two coils 701. Coils 701 canthen be moved in successive steps over the entire surface ofmagnetizable material 702 until an array of magnetic regions is formed.Such a method is particularly applicable to form an array such as shownin FIG. 13b.

Instead of using a base 703 of high permeability material,alternatively, the magnetizable material can be lined with non-magneticmaterial 704 and directly pressed from either side by two coils 701 tomagnetize magnetizable material 702. Magnetized material 702 is thenplaced on a cast iron plate or steel plate 707. Due to the highattraction forces, magnetic material 702 can be lowered by a suitablejack, wax 705 being used to support magnetized magnetic material 702 onthe surface of plate 707. Once magnets 702 are in position, wax 705 canbe melted away to achieve close contact between the magnets 702 and thebase plate 707.

Note that although the diamond array of FIG. 13c could achieve similarresults if the shapes of magnets 301, 302 were changed to aparallelogram shape because diagonals of such parallelogram-shapedmagnets would still be perpendicular.

Note that although the embodiments described above relate to planar X-Ytraversing systems, the invention applies equally to other types oftraversing systems. For example, a traversing system in which a stagemoves about a non-planar base could also employ the features describedabove for the base. Such devices are considered to be within the scopeof at least some of the claims.

Note that claims may refer to independent movement in multiple axialdirections using terms like orthogonal and perpendicular. It is clearthat wherever in the specification movement along mutually perpendicularor orthogonal directions is discussed, such movement can be regarded ascharacterizing marginal degrees of freedom and therefore encompass anyorthogonal coordinate system. For example, the X-direction could beregarded as an angle and the Y-direction as a displacement along theaxis of a cylindrical coordinate system. Such variations within thescope of the invention and within the scope of at least some of theclaims below. It is also noted here that such terms are not intended tobe construed as narrowly as the mathematical sense of orthogonalcoordinate systems. For example, a cylindrical coordinate system is nottruly an orthogonal coordinate system. However, the present invention isapplicable to a system that moves a stage over a cylindrical surfacewith projection of the X-Y grid on the cylindrical surface. Such asystem is disclosed in Applicant's application filed prior to orconcurrently with this application (The device is summarized in the nextsection summarily describing a rotary linear motor). Claims that speakof perpendicular or orthogonal movement are intended to cover movementsuch as that in such a cylindrical encoder system. In a cylindricalarrangement, magnets would be arranged in a translationally symmetricpattern, just as in the flat platen. The term "translationallysymmetric" is used here to characterize any pattern that is achieved bymaking copies of the same thing at equal distances from each other. So,for example, a regular pattern of identical tiles forms atranslationally symmetric array whether they are laid on a flat surfaceor a cylindrical surface.

SUMMARY DESCRIPTION OF A ROTARY-LINEAR MOTOR

Briefly, a motor, with two independent degrees of freedom, rotates astage about an axis and moves the stage along the axis, the range ofmotion defining a cylinder or cylindrical section. The stage is mountedon a hollow cylindrical plunger fitting in an annular well. The plungerfloats on an air-bearing. The plunger has an array of permanent magnetson its external cylindrical face opposite coils in the well. Equalnumbers of oppositely-polarized permanent magnets are arranged in aregular cylindrical pattern at 50% packing density forming rings andcolumns of like-polarity magnets, the rings of one polarity alternatingwith rings of opposite polarity and the columns of one polarityalternating with columns of opposite polarity. A set of Z-axis coils(for axial movement) curve (the term "curve" being used in its generalmathematical sense to encompass straight lines as well is non-straightlines) around the plunger and are shaped to allow a current in them toimpel the rings of like-polarized magnets. A set of φ-axis coils (forrotational movement) have longitudinal axes that are parallel the axisof the plunger and are sized to allow current in them to impel thecolumns of like-polarized magnets. Air is injected into a space betweena center column defining the center of the annular well and the internalsurface of the plunger to support the plunger. Part of the externalsurface of the plunger has a grid scale encoded by Z-axis and φ-axisoptical pickups to provide position information to a controller.

According to an embodiment of the present invention, there is provided,a rotary-linear motor, comprising: first and second elements, eachhaving a common axis, the first element having at least one magnet, thesecond element having at least first and second electrical coils capableof generating respective first and second magnetic fields, a bearing tosupport the first element with respect to the second element to allowthe first and second elements to rotate about an axis relative to eachother and to slide in a direction collinear with the axis, the first andsecond coils being positioned relative to each other and relative to themagnet such as to produce a substantial motive force capable of bothrotating and displacing the first and second elements with respect toeach other when the first and second coils are excited by an electricalcurrent.

According to another embodiment of the present invention, there isprovided, a rotary-linear motor, comprising: a base element having oneof a plurality of magnets and a plurality of coils, a stage elementhaving the other of a plurality of magnets and a plurality of coils, thestage element being connected to the base element such that the stageelement is free to rotate on an axis and slide along the axis, theplurality of magnets and the plurality of coils being arranged togenerate a motive force therebetween when the plurality of coils isenergized.

According to still another embodiment of the present invention, there isprovided, a rotary-linear motor, comprising: a base member, a stagemember, the base member having a first cylindrical surface, the stagemember having a second cylindrical surface, the first and secondcylindrical surfaces having a common axis, the base having one of aplurality of magnets and a plurality of electric coils shaped in such away as to define a first cylinder coaxial with the common axis and thestage having another of the plurality of magnets and the plurality ofelectric coils shaped in such a way as to define a second cylindercoaxial with the common axis.

The above rotary-linear motor can employ a multi-axis encoder system,such as described in the present application. The grid scale would beprojected on a cylindrical surface and the X- and Y- optical pickupswould resolve axial and tangential portions of the curved grid scale.

Although only a few exemplary embodiments of this invention have beendescribed in detail above, those skilled in the art will readilyappreciate that many modifications are possible in the exemplaryembodiment(s) without materially departing from the novel teachings andadvantages of this invention. Accordingly, all such modifications areintended to be included within the scope of this invention as defined inthe following claims. In the claims, means-plus-function clauses areintended to cover the structures described herein as performing therecited function and not only structural equivalents but also equivalentstructures. Thus although a nail and screw may not be structuralequivalents in that a nail relies entirely on friction between a woodenpart and a cylindrical surface whereas a screw's helical surfacepositively engages the wooden part, in the environment of fasteningwooden parts, a nail and a screw may be equivalent structures.

What is claimed is:
 1. A positioning system, comprising:a motor platenwith a planar array of substantially parallelogram-shaped magnets; saidplanar array having first magnets with their north poles facing in afirst direction perpendicular to a plane of said planar array; saidplanar array having second magnets with their north poles facing in asecond direction, opposite said first direction; said first magnetsforming a first regular array of parallel columns and a first regulararray of parallel rows; said second magnets forming a second regulararray of parallel columns and a second regular array of parallel rows;said first regular array of parallel columns being parallel to saidsecond regular array of parallel columns and said first regular array ofparallel rows being parallel to said second regular array of parallelrows; said planar array being characterized by a packing density ofapproximately 100%; a stage movably connected to said motor platen; saidstage having a first longitudinal coil with a long axis parallel to saidfirst axis; and said stage having a second longitudinal coil with a longaxis parallel to said second axis.
 2. A positioning system as in claim1, wherein said stage is supported on said platen by an air bearing. 3.A motor, comprising:a base having a surface; a stage having an X-motorand a Y-motor and a bearing to support said stage at a substantiallyconstant distance from said surface; said base having an array of firstmagnets and second magnets, each having a north pole; said X-motor andsaid Y-motor being effective to interact with fields generated by saidfirst and second magnets to produce a motive force to move said stagerelative to said base; said first magnets being oriented with said northpoles thereof directed oppositely said north poles of said secondmagnets; said first and second magnets being arranged in an arrayconforming to said surface such that a translationally symmetric familyof curves lies in said surface, each curve of said substantiallyintercepting said first magnets without intercepting said secondmagnets, or substantially intercepting said second magnets withoutintercepting said first magnets; each of said first and being shapedsuch that said family of curves can also be placed such that firstportions of each of said family of curves that substantially interceptonly first magnets without intercepting any second magnets, orsubstantially intercept only second magnets without intercepting anyfirst magnets, is greater than second portions not intercepting anymagnet; and each of said family of curves having a constant slope in acoordinate system defined by a range of movement of said motor andoriginating at points at identical relative positions on two of saidfirst magnets or two of said second magnets.
 4. A motor as in claim 3wherein flat projections of said first and second magnets aresubstantially round.
 5. A motor, comprising;a base having a surface; astage having an X-motor and a Y-motor and a bearing to support saidstage at a substantially constant distance from said surface; said basehaving an array of first magnets and second magnets, each having a northpole; said X-motor and said Y-motor being effective to interact withfields generated by said first and second magnets to produce a motiveforce to move said stage relative to said base; said first magnets beingoriented with said north poles thereof directed oppositely said northpoles of said second magnets; said first and second magnets beingarranged in an array conforming to said surface such that atranslationally symmetric family of curves lies in said surface, eachcurve of said family substantially intercepting said first magnetswithout intercepting said second magnets, or substantially interceptingsaid second magnets intercepting said first magnets; each of said firstand second magnets being shaped such that said family of curves can alsobe place such that the first portions of each of said family of curvesthat substantially intercept only first magnets without intercepting anysecond magnets, or substantially intercept only second magnets withoutintercepting any first magnets, is greater than second portions notintercepting any magnet; and each of said family of curves having aconstant slope in a coordinate system defined by a range of movement ofsaid motor and originating at points at identical relative positions ontwo of said first magnets or two of said second magnets; flatprojections of said first and second magnets being substantially roundflat projections of said first and second magnets beingparallelogram-shaped, said family of curves joining diagonal corners ofsaid first and second magnets in plan form.
 6. A motor comprising:a basehaving a surface; a stage having an X-motor and a Y-motor and a bearingto support said stage at a substantially constant distance from saidsurface; said base having an array of first magnets and second magnets,each having a north pole; said X-motor and said Y-motor being effectiveto interact with fields generated by said first and second magnets toproduce a motive force to move said stage relative to said base; saidfirst magnets being oriented with said north poles thereof directedoppositely said north poles of said second magnets; said first andsecond magnets being arranged in an array conforming to said surfacesuch that translationally symmetric family of curves lies in saidsurface, each curve of said family substantially intercepting said firstmagnets without intercepting said second magnets, or substantiallyintercepting said second magnets without intercepting said firstmagnets; each of said first and second magnets being shaped such thatsaid family of curves can also be placed such that first portions ofeach of said family of curves that substantially intercept only firstmagnets without intercepting any second magnets, or substantiallyintercept only second magnets without intercepting any first magnets, isgreater than second portions not intercepting any magnet; and each ofsaid family of curves having a constant slope in a coordinate systemdefined by a range of movement of said motor and originating at pointsat identical relative positions on two of said said first magnets or twoof said second magnets; flat projections of said first and secondmagnets being parallelogram-shaped, said family of curves joiningdiagonal corners of said first and second magnets.